advanced mems design:
Content

MEMS Overview: Unique Characteristics of MEMS; Typical Application Areas of MEMS
MEMS Overview: Examples of MEMS; Future Directions of MEMS MEMS Solutions for Data Storage: Technical Rationale; HexSil Linear Actuator MEMS Solutions for Energy Storage: Overview; MEMS Energy Harvesters; Other Technologies MEMS Flexures: Overview; Technical Rationale; Examples MEMS Flexures: Optimal Design; Basic Flexure Types: Hammock, Crableg and Doublefolded PROJECT 1: Parametric Design of MEMS Flexures for X and YStiffness MEMS Flexures: Stress Analysis; Flexible Design Method; Unified Beam Bending Theory MEMS Accelerometer: Dynamic Principles; Design; Analysis; Survey of Accelerometers MEMS Flexures: Meandering Flexures; Solving Procedures MEMS Flexures: Nonlinear limits; Shear and Axial Effect MEMS Flexures: Electrostatic Actuation: Derivation MEMS Materials: Mechanical Properties of Materials; MEMS Material Deposition Process MEMS Materials: Failure of Materials; MEMS Materials Tests MEMS Anchors: Background; Fabrication; Finite Element Model Distributed Parameter Oscillator: Rayleigh’s Principle; Rayleigh’s Energy Method MEMS Angular Accelerometer: Design Concept; Analysis MEMS Optimization: Design; Optimization Paradigm; Examples MEMS Optimization: Monotonicity Analysis MEMS Optimization: Monotonicity Analysis MEMS Optimization: Monotonicity Analysis MEMS Optimization: Parametric Optimization; Constrained Optimization PROJECT 3: Optimal Design of MEMS Angular Accelerometer via Monotonicity Analysis and Grid Study MEMS Optimization: Penalty Function Method MEMS Optimization: Unconstrained Optimization; Method of Steepest descent MEMS Optimization: MATLAB Package of Optimization Routines MEMS Optimization: Quadratic Approximation; Conjugate Directional Method MEMS Optimization: Lagrange Multiplier Method MEMS Pivots: Stress Analysis MEMS Pivots: Stress Evaluation; Design Approach MEMS Fluidics: Overview MEMS Fluidics: Micro Mixers MEMS Fluidics: Micro Needles MEMS Fluidics: Micro Valves and Pumps MEMS Flow: Newtonian Fluids; Couette Flow; Viscous Damping of Resonators MEMS Flow: Stokes Solution; Effect of Reynolds Number MEMS Flow: Stokes Flow; Poiseuille Flow; Pressure Drop; Entrance Effects MEMS Flow: Surface Energy; Bubble Actuators; Bubble Valve MEMS Visualization: Methods and Results MEMS Simulation: Micromirror MEMS Inertial Instrument: Rotary Internal Combustion Engine MEMS Inertial Instrument: Angular Rate Sensing MEMS Inertial Instrument: Review of Gyroscopes MEMS Inertial Instruments: Analog Devices’ ADXL50 
Textbooks

VLSI Technology, WaiKai Chen
Silicon VLSI Technology: Fundamentals, Practice, and Modeling, James D. Plummer, Michael Deal, Peter D. Griffin 