advanced mems design:

Content

MEMS Overview: Unique Characteristics of MEMS; Typical Application Areas of MEMS

MEMS Overview: Examples of MEMS; Future Directions of MEMS

MEMS Solutions for Data Storage: Technical Rationale; HexSil Linear Actuator

MEMS Solutions for Energy Storage: Overview; MEMS Energy Harvesters; Other Technologies

MEMS Flexures: Overview; Technical Rationale; Examples

MEMS Flexures: Optimal Design; Basic Flexure Types: Hammock, Crab-leg and Double-folded

PROJECT 1: Parametric Design of MEMS Flexures for X- and Y-Stiffness

MEMS Flexures: Stress Analysis; Flexible Design Method; Unified Beam Bending Theory

MEMS Accelerometer: Dynamic Principles; Design; Analysis; Survey of Accelerometers

MEMS Flexures: Meandering Flexures; Solving Procedures

MEMS Flexures: Non-linear limits; Shear and Axial Effect

MEMS Flexures: Electrostatic Actuation: Derivation

MEMS Materials: Mechanical Properties of Materials; MEMS Material Deposition Process

MEMS Materials: Failure of Materials; MEMS Materials Tests

MEMS Anchors: Background; Fabrication; Finite Element Model

Distributed Parameter Oscillator: Rayleigh’s Principle; Rayleigh’s Energy Method

MEMS Angular Accelerometer: Design Concept; Analysis

MEMS Optimization: Design; Optimization Paradigm; Examples

MEMS Optimization: Monotonicity Analysis

MEMS Optimization: Monotonicity Analysis

MEMS Optimization: Monotonicity Analysis

MEMS Optimization: Parametric Optimization; Constrained Optimization

PROJECT 3: Optimal Design of MEMS Angular Accelerometer via Monotonicity Analysis and

Grid Study

MEMS Optimization: Penalty Function Method

MEMS Optimization: Unconstrained Optimization; Method of Steepest descent

MEMS Optimization: MATLAB Package of Optimization Routines

MEMS Optimization: Quadratic Approximation; Conjugate Directional Method

MEMS Optimization: Lagrange Multiplier Method

MEMS Pivots: Stress Analysis

MEMS Pivots: Stress Evaluation; Design Approach

MEMS Fluidics: Overview

MEMS Fluidics: Micro Mixers

MEMS Fluidics: Micro Needles

MEMS Fluidics: Micro Valves and Pumps

MEMS Flow: Newtonian Fluids; Couette Flow; Viscous Damping of Resonators

MEMS Flow: Stokes Solution; Effect of Reynolds Number

MEMS Flow: Stokes Flow; Poiseuille Flow; Pressure Drop; Entrance Effects

MEMS Flow: Surface Energy; Bubble Actuators; Bubble Valve

MEMS Visualization: Methods and Results

MEMS Simulation: Micromirror

MEMS Inertial Instrument: Rotary Internal Combustion Engine

MEMS Inertial Instrument: Angular Rate Sensing

MEMS Inertial Instrument: Review of Gyroscopes

MEMS Inertial Instruments: Analog Devices’ ADXL50

Textbooks 

VLSI Technology, Wai-Kai Chen
Silicon VLSI Technology: Fundamentals, Practice, and Modeling, James D. Plummer, Michael Deal, Peter D. Griffin