mems and microsystems:

Content

Introduction to Microsensors

Evoluation of MEMS, Microsensors, Market Survey

Application of MEMS

MEMS Materials

MEMS Materials Properties - I

MEMS Materials Properties - II

Microelectronic Technology for MEMS - II

Microelectronic Technology for MEMS - III

Micromachining Technology for MEMS

Micromachining Process

Etch Stop Techniques and Microstructure

Surface and Quartz Micromachining

Fabrication of Micromachined Microstructure

Microstereolithography

MEMS Microsensors Thermal

Micromachined Microsensors Mechanical

MEMS Pressure and Flow Sensor

Micromachined Flow Sensors

MEMS Inertial Sensors

Micromachined Microaccelerometers

Accelerometers for Avionics

Temperature Drift and Damping Analysis

Piezoresistive Accelerometer Technology

MEMS Capacitive Accelerometer

MEMS Capacitive Accelerometer Process

MEMS Gyro Sensor

MEMS for Space Application

Wafer Bonding, Packaging of MEMS

Interface Electronics for MEMS

MEMS for Biomedical Applications (Bio-MEMS)

Textbooks 

Microsystem Design, Senturia, Stephen D.
Micro-machined Transducers Sourcebook, Gregory T. Kovacs