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MEMS DESIGN

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Instructor: Dr. Mohamed ElSheikh
Integrated Circuits Lab
Ain Shams University

Date: Spring 2013


Course Objectives

- To provide students with foundational background on MEMS basic fabrication processes with focus on Layout and Process flows.
- To provide the students with basic knowledge in structural mechanics and properties of material.
- To make the students able to design main building blocks in MEMS including suspension elements, actuators, and sensing elements.
- To give the students adequate background of MEMS modeling techniques including lumped-element, reduced-order, and finite-element modeling.

Course Contents

- MEMS History and System Design basics: 1 lecture
- Technology and layout basics: 3 lectures
- Material properties & structural mechanics:  3 lectures
- MEMS Design elements: 8 lectures
  - Suspension systems: 2 lectures
  - Sensing elements: 3 lecture
  - Actuators: 3 lectures
- Case Study I: 2 lectures
- Case Study II: 2 lectures

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