MEMS DESIGN
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Course Objectives
- To provide students with foundational background on MEMS basic fabrication processes with focus on Layout and Process flows. - To provide the students with basic knowledge in structural mechanics and properties of material. - To make the students able to design main building blocks in MEMS including suspension elements, actuators, and sensing elements. - To give the students adequate background of MEMS modeling techniques including lumped-element, reduced-order, and finite-element modeling. Course Contents - MEMS History and System Design basics: 1 lecture - Technology and layout basics: 3 lectures - Material properties & structural mechanics: 3 lectures - MEMS Design elements: 8 lectures - Suspension systems: 2 lectures - Sensing elements: 3 lecture - Actuators: 3 lectures - Case Study I: 2 lectures - Case Study II: 2 lectures |
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